Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877379 | Illumination intensity correction device for specifying an illumination intensity over an illumination field of a lithographic projection exposure apparatus | Martin Endres | 2020-12-29 |
| 10580545 | Beam delivery apparatus and method | Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Lucas J. P. Ament, Pieter Willem Herman De Jager, Gosse Charles De Vries +11 more | 2020-03-03 |