Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10712678 | Imprint lithography apparatus and method | Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink, Arie Jeffrey Den Boef, Michael Jozef Mathijs Renkens, Gerard Van Schothorst +5 more | 2020-07-14 |
| 10698312 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Pieter-Jan Van Zwol, Jozef Petrus Henricus Benschop, Florian Didier Albin Dhalluin, Mária Péter, Luigi Scaccabarozzi +1 more | 2020-06-30 |
| 10678140 | Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter | Han-Kwang Nienhuys, Luigi Scaccabarozzi | 2020-06-09 |
| 10580545 | Beam delivery apparatus and method | Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager, Gosse Charles De Vries +11 more | 2020-03-03 |
| 10555407 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Alexey Olegovich POLYAKOV, Richard Quintanilha, Coen Adrianus Verschuren | 2020-02-04 |