Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10725381 | Optical systems, metrology apparatus and associated method | Sietse Thijmen Van Der Post, Stefan Michael Bruno Bäumer, Peter Danny Van Voorst, Teunis Willem Tukker, Ferry Zijp +1 more | 2020-07-28 |
| 10678140 | Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter | Vadim Yevgenyevich Banine, Luigi Scaccabarozzi | 2020-06-09 |
| 10580545 | Beam delivery apparatus and method | Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager +11 more | 2020-03-03 |
| 10580546 | Radiation system | Rilpho Ludovicus Donker, Gosse Charles De Vries | 2020-03-03 |