Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10725381 | Optical systems, metrology apparatus and associated method | Sietse Thijmen Van Der Post, Stefan Michael Bruno Bäumer, Teunis Willem Tukker, Ferry Zijp, Han-Kwang Nienhuys +1 more | 2020-07-28 |
| 10670974 | Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate | Gerrit Jacobus Hendrik Brussaard, Petrus Wilhelmus SMORENBURG, Teis Johan Coenen, Niels Geypen, Sander Bas Roobol | 2020-06-02 |