Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10670974 | Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate | Petrus Wilhelmus SMORENBURG, Teis Johan Coenen, Niels Geypen, Peter Danny Van Voorst, Sander Bas Roobol | 2020-06-02 |
| 10642172 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | David O Dwyer, Petrus Wilhelmus SMORENBURG | 2020-05-05 |
| 10630037 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders +2 more | 2020-04-21 |
| 10530111 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders +2 more | 2020-01-07 |