Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816906 | HHG source, inspection apparatus and method for performing a measurement | Nan Lin, Arie Jeffrey Den Boef, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen | 2020-10-27 |
| 10725386 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij | 2020-07-28 |
| 10670974 | Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate | Gerrit Jacobus Hendrik Brussaard, Petrus Wilhelmus SMORENBURG, Teis Johan Coenen, Peter Danny Van Voorst, Sander Bas Roobol | 2020-06-02 |