Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795269 | Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method | Zili Zhou, Gerbrand Van Der Zouw, Nitesh Pandey, Martinus Hubertus Maria Van Weert, Anagnostis Tsiatmas +2 more | 2020-10-06 |
| 10761432 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Stefan Hunsche | 2020-09-01 |
| 10732513 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Stefan Hunsche, Willem Marie Julia Marcel Coene | 2020-08-04 |
| 10725386 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar | 2020-07-28 |
| 10649345 | Methods and apparatuses for measurement of a parameter of a feature fabricated on a substrate | Maxim PISARENCO, Sebastianus Adrianus GOORDEN | 2020-05-12 |
| 10627723 | Yield estimation and control | Scott Anderson Middlebrooks, Willem Coene, Frank Arnoldus Johannes Maria Driessen, Adrianus Cornelis Matheus Koopman | 2020-04-21 |
| 10607334 | Method and apparatus for image analysis | Scott Anderson Middlebrooks, Maxim PISARENCO, Adrianus Cornelis Matheus Koopman, Stefan Hunsche, Willem Marie Julia Marcel Coene | 2020-03-31 |
| 10592618 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Remco Dirks, Maxim PISARENCO | 2020-03-17 |