Issued Patents 2020
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866526 | Metrology method and device | Yevgeniy Konstantinovich Shmarev, Armand Eugene Albert Koolen | 2020-12-15 |
| 10845304 | Scatterometer and method of scatterometry using acoustic radiation | Maxim PISARENCO, Alessandro Polo | 2020-11-24 |
| 10816909 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2020-10-27 |
| 10795269 | Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method | Zili Zhou, Gerbrand Van Der Zouw, Markus Gerardus Martinus Maria Van Kraaij, Martinus Hubertus Maria Van Weert, Anagnostis Tsiatmas +2 more | 2020-10-06 |
| 10788758 | Method of measuring a parameter of interest, device manufacturing method, metrology apparatus, and lithographic system | Jin LIAN | 2020-09-29 |
| 10775704 | Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein | Arie Jeffrey Den Boef, Marinus Johannes Maria Van Dam | 2020-09-15 |
| 10747124 | Method of measuring a target, metrology apparatus, polarizer assembly | Zili Zhou | 2020-08-18 |
| 10678145 | Radiation receiving system | Alessandro Polo, Armand Eugene Albert Koolen | 2020-06-09 |
| 10670975 | Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured | Robert John Socha, Arie Jeffrey Den Boef | 2020-06-02 |
| 10656534 | Method of measuring, device manufacturing method, metrology apparatus, and lithographic system | Jin LIAN, SAMEE UR-REHMAN, Martin Jacobus Johan Jak | 2020-05-19 |
| 10620550 | Metrology method and apparatus | Martin Jacobus Johan Jak, Martin Ebert, Arie Jeffrey Den Boef | 2020-04-14 |
| 10599047 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Zili Zhou, Armand Eugene Albert Koolen, Sebastianus Adrianus GOORDEN, Bastiaan Onne Fagginger Auer +1 more | 2020-03-24 |