Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831107 | Method for of measuring a parameter relating to a structure formed using a lithographic process | Sergei Sokolov | 2020-11-10 |
| 10788758 | Method of measuring a parameter of interest, device manufacturing method, metrology apparatus, and lithographic system | Nitesh Pandey | 2020-09-29 |
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Murat Bozkurt, Alberto Da Costa Assafrao, Marc Johannes Noot +1 more | 2020-07-07 |
| 10656534 | Method of measuring, device manufacturing method, metrology apparatus, and lithographic system | Nitesh Pandey, SAMEE UR-REHMAN, Martin Jacobus Johan Jak | 2020-05-19 |