Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831107 | Method for of measuring a parameter relating to a structure formed using a lithographic process | Jin LIAN | 2020-11-10 |
| 10788757 | Metrology method and apparatus, computer program and lithographic system | Su-Ting CHENG, Armand Eugene Albert Koolen | 2020-09-29 |