Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788757 | Metrology method and apparatus, computer program and lithographic system | Sergei Sokolov, Armand Eugene Albert Koolen | 2020-09-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788757 | Metrology method and apparatus, computer program and lithographic system | Sergei Sokolov, Armand Eugene Albert Koolen | 2020-09-29 |