Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809193 | Inspection apparatus having non-linear optics | Richard Carl Zimmerman | 2020-10-20 |
| 10775704 | Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein | Nitesh Pandey, Arie Jeffrey Den Boef | 2020-09-15 |