Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845304 | Scatterometer and method of scatterometry using acoustic radiation | Maxim PISARENCO, Nitesh Pandey | 2020-11-24 |
| 10788766 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Duygu Akbulut, Simon Gijsbert Josephus Mathijssen | 2020-09-29 |
| 10678145 | Radiation receiving system | Nitesh Pandey, Armand Eugene Albert Koolen | 2020-06-09 |
| 10585363 | Alignment system | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans, Adrianus Johannes Hendrikus Schellekens, Elahe Yeganegi Dastgerdi +3 more | 2020-03-10 |
| 10527959 | Position sensor, lithographic apparatus and method for manufacturing devices | Simon Reinald HUISMAN, Simon Gijsbert Josephus Mathijssen, Sebastianus Adrianus GOORDEN, Duygu Akbulut | 2020-01-07 |