Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788766 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Alessandro Polo, Simon Gijsbert Josephus Mathijssen | 2020-09-29 |
| 10527959 | Position sensor, lithographic apparatus and method for manufacturing devices | Simon Reinald HUISMAN, Simon Gijsbert Josephus Mathijssen, Sebastianus Adrianus GOORDEN, Alessandro Polo | 2020-01-07 |