Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10670973 | Coloring aware optimization | Yi Zou, Jing Su, Christopher A. Spence, Duan-Fu Stephen Hsu | 2020-06-02 |
| 10670975 | Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured | Arie Jeffrey Den Boef, Nitesh Pandey | 2020-06-02 |
| 10657641 | Source and mask optimization by changing intensity and shape of the illumination source and magnitude and phase of mask diffraction orders | — | 2020-05-19 |