Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10599047 | Metrology apparatus, lithographic system, and method of measuring a structure | Nitesh Pandey, Zili Zhou, Armand Eugene Albert Koolen, Sebastianus Adrianus GOORDEN, Bastiaan Onne Fagginger Auer +1 more | 2020-03-24 |