Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795269 | Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method | Zili Zhou, Nitesh Pandey, Markus Gerardus Martinus Maria Van Kraaij, Martinus Hubertus Maria Van Weert, Anagnostis Tsiatmas +2 more | 2020-10-06 |
| 10551308 | Focus control arrangement and method | Martin Jacobus Johan Jak, Armand Eugene Albert Koolen, Dirk Broddin | 2020-02-04 |
| 10534274 | Method of inspecting a substrate, metrology apparatus, and lithographic system | Teunis Willem Tukker, Amandev Singh | 2020-01-14 |