Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10534274 | Method of inspecting a substrate, metrology apparatus, and lithographic system | Teunis Willem Tukker, Gerbrand Van Der Zouw | 2020-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10534274 | Method of inspecting a substrate, metrology apparatus, and lithographic system | Teunis Willem Tukker, Gerbrand Van Der Zouw | 2020-01-14 |