Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852247 | Variable corrector of a wave front | Stanislav Smirnov, Johannes Matheus Marie De Wit, Armand Eugene Albert Koolen | 2020-12-01 |
| 10725381 | Optical systems, metrology apparatus and associated method | Sietse Thijmen Van Der Post, Stefan Michael Bruno Bäumer, Peter Danny Van Voorst, Ferry Zijp, Han-Kwang Nienhuys +1 more | 2020-07-28 |
| 10534274 | Method of inspecting a substrate, metrology apparatus, and lithographic system | Amandev Singh, Gerbrand Van Der Zouw | 2020-01-14 |