Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10725381 | Optical systems, metrology apparatus and associated method | Stefan Michael Bruno Bäumer, Peter Danny Van Voorst, Teunis Willem Tukker, Ferry Zijp, Han-Kwang Nienhuys +1 more | 2020-07-28 |
| 10712673 | Method of determining a property of a structure, inspection apparatus and device manufacturing method | Koos Van Berkel | 2020-07-14 |
| 10613448 | Method and apparatus for determining alignment properties of a beam of radiation | — | 2020-04-07 |
| 10578979 | Method and apparatus for inspection and metrology | Ferry Zijp, Sander Bas Roobol | 2020-03-03 |