Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816906 | HHG source, inspection apparatus and method for performing a measurement | Nan Lin, Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen, Niels Geypen | 2020-10-27 |
| 10725387 | Determining an edge roughness parameter of a periodic structure | Teis Johan Coenen, Sipke Jacob Bijlsma | 2020-07-28 |
| 10670974 | Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate | Gerrit Jacobus Hendrik Brussaard, Petrus Wilhelmus SMORENBURG, Teis Johan Coenen, Niels Geypen, Peter Danny Van Voorst | 2020-06-02 |
| 10649344 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Simon Gijsbert Josephus Mathijssen | 2020-05-12 |
| 10630037 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan +2 more | 2020-04-21 |
| 10578979 | Method and apparatus for inspection and metrology | Sietse Thijmen Van Der Post, Ferry Zijp | 2020-03-03 |
| 10530111 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Simon Gijsbert Josephus Mathijssen, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan +2 more | 2020-01-07 |