Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10725387 | Determining an edge roughness parameter of a periodic structure | Sander Bas Roobol, Sipke Jacob Bijlsma | 2020-07-28 |
| 10670974 | Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate | Gerrit Jacobus Hendrik Brussaard, Petrus Wilhelmus SMORENBURG, Niels Geypen, Peter Danny Van Voorst, Sander Bas Roobol | 2020-06-02 |