Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732498 | Patterning device | Pieter Cristiaan DE GROOT, Gerard Frans Jozef Schasfoort, Maksym SLADKOV, Manfred Petrus Johannes Maria DIKKERS, Jozef Maria Finders +6 more | 2020-08-04 |
| 10725381 | Optical systems, metrology apparatus and associated method | Sietse Thijmen Van Der Post, Peter Danny Van Voorst, Teunis Willem Tukker, Ferry Zijp, Han-Kwang Nienhuys +1 more | 2020-07-28 |
| 10712674 | Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured thereby | Stefan Kuiper, Erwin John Van Zwet, Hamed Sadeghian Marnani | 2020-07-14 |