Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761315 | High power adaptive mirror | Teunis Cornelis van den Dool, Evert Nieuwkoop | 2020-09-01 |
| 10712674 | Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured thereby | Stefan Kuiper, Stefan Michael Bruno Bäumer, Hamed Sadeghian Marnani | 2020-07-14 |