Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859925 | Method of and system for determining an overlay or alignment error between a first and a second device layer of a multilayer semiconductor device | Violeta Navarro Paredes, Maarten Hubertus van Es | 2020-12-08 |
| 10852641 | Thermal nanolithography method and system | — | 2020-12-01 |
| 10775405 | Method of and system for performing defect detection on or characterization of a layer of a semiconductor element or semi-manufactured semiconductor element | Maarten Hubertus van Es, Rutger Meijer Timmerman Thijssen | 2020-09-15 |
| 10746702 | Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product | Rutger Meijer Timmerman Thijssen, Maarten Hubertus van Es | 2020-08-18 |
| 10712674 | Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured thereby | Stefan Kuiper, Erwin John Van Zwet, Stefan Michael Bruno Bäumer | 2020-07-14 |
| 10697998 | Method of performing surface measurements on a surface of a sample, and scanning probe microscopy system therefore | Aliasghar Keyvani Janbahan | 2020-06-30 |
| 10663874 | Alignment system and method | — | 2020-05-26 |
| 10578643 | Determining interaction forces in a dynamic mode AFM during imaging | Mehmet Selman Tamer | 2020-03-03 |