Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859925 | Method of and system for determining an overlay or alignment error between a first and a second device layer of a multilayer semiconductor device | Maarten Hubertus van Es, Hamed Sadeghian Marnani | 2020-12-08 |