Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866526 | Metrology method and device | Nitesh Pandey, Armand Eugene Albert Koolen | 2020-12-15 |
| 10754259 | Method and device for pupil illumination in overlay and critical dimension sensors | Markus Franciscus Antonius Eurlings | 2020-08-25 |
| 10747010 | Beam splitting prism systems | Douglas C. CAPPELLI, Stanislav Smirnov, Richard Carl Zimmerman, Joshua Adams, Alexander K. Raub | 2020-08-18 |
| 10724961 | Method and device for focusing in an inspection system | Stanislav Smirnov | 2020-07-28 |