Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10754259 | Method and device for pupil illumination in overlay and critical dimension sensors | Yevgeniy Konstantinovich Shmarev | 2020-08-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10754259 | Method and device for pupil illumination in overlay and critical dimension sensors | Yevgeniy Konstantinovich Shmarev | 2020-08-25 |