Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10739687 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Bastiaan Onne Fagginger Auer, Davit Harutyunyan, Patrick Warnaar | 2020-08-11 |
| 10725386 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Alexander Straaijer, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij | 2020-07-28 |
| 10718604 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2020-07-21 |