Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698312 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Pieter-Jan Van Zwol, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Florian Didier Albin Dhalluin, Mária Péter +1 more | 2020-06-30 |
| 10678140 | Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter | Vadim Yevgenyevich Banine, Han-Kwang Nienhuys | 2020-06-09 |