Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698312 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Pieter-Jan Van Zwol, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Mária Péter, Luigi Scaccabarozzi +1 more | 2020-06-30 |