Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852640 | Optical diffraction component for suppressing at least one target wavelength by destructive interference | Heiko Feldmann, Valentin Jonatan Bolsinger, William Peter Van Drent | 2020-12-01 |
| 10698312 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Pieter-Jan Van Zwol, Vadim Yevgenyevich Banine, Florian Didier Albin Dhalluin, Mária Péter, Luigi Scaccabarozzi +1 more | 2020-06-30 |
| RE47943 | Dual stage lithographic apparatus and device manufacturing method | Marinus Aart Van Den Brink, Erik Roelof Loopstra | 2020-04-14 |