Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10747127 | Lithographic apparatus | Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH +17 more | 2020-08-18 |
| 10580545 | Beam delivery apparatus and method | Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager +11 more | 2020-03-03 |
| 10580546 | Radiation system | Han-Kwang Nienhuys, Rilpho Ludovicus Donker | 2020-03-03 |