Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10712669 | Method and apparatus for direct write maskless lithography | Erwin Paul SMAKMAN | 2020-07-14 |
| 10555407 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Alexey Olegovich POLYAKOV, Richard Quintanilha, Vadim Yevgenyevich Banine | 2020-02-04 |
| 10527950 | Apparatus for direct write maskless lithography | Erwin Paul SMAKMAN | 2020-01-07 |