Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10634490 | Determining edge roughness parameters | Martin Jacobus Johan Jak, Arie Jeffrey Den Boef, Michael Kubis | 2020-04-28 |
| 10555407 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Alexey Olegovich POLYAKOV, Vadim Yevgenyevich Banine, Coen Adrianus Verschuren | 2020-02-04 |