Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768535 | Support apparatus, a lithographic apparatus and a device manufacturing method | Robbert Arij Jeroen De Jong, Martinus Hendrikus Antonius Leenders, Evelyn Wallis Pacitti, Thomas POIESZ, Frank Pieter Albert Van Den Berkmortel | 2020-09-08 |
| 10712678 | Imprint lithography apparatus and method | Yvonne Wendela Kruijt-Stegeman, Arie Jeffrey Den Boef, Vadim Yevgenyevich Banine, Michael Jozef Mathijs Renkens, Gerard Van Schothorst +5 more | 2020-07-14 |
| 10705438 | Lithographic method | Laurentius Johannes Adrianus Van Bokhoven, Stan Henricus Van Der Meulen, Yang-Shan Huang, Federico La Torre, Bearrach Moest +4 more | 2020-07-07 |
| 10571814 | Lithographic method | Laurentius Johannes Adrianus Van Bokhoven, Stan Henricus Van Der Meulen, Yang-Shan Huang, Federico La Torre, Bearrach Moest +4 more | 2020-02-25 |