Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768535 | Support apparatus, a lithographic apparatus and a device manufacturing method | Andre Bernardus Jeunink, Robbert Arij Jeroen De Jong, Martinus Hendrikus Antonius Leenders, Thomas POIESZ, Frank Pieter Albert Van Den Berkmortel | 2020-09-08 |
| 10719019 | Substrate holder and a method of manufacturing a substrate holder | Thomas POIESZ, Satish Achanta, Mehmet Ali AKBAS, Pavlo ANTONOV, Jeroen BOUWKNEGT +4 more | 2020-07-21 |