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Lithographic apparatus |
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2020-09-29 |
| 10768536 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens |
2020-09-08 |
| 10768535 |
Support apparatus, a lithographic apparatus and a device manufacturing method |
Andre Bernardus Jeunink, Robbert Arij Jeroen De Jong, Evelyn Wallis Pacitti, Thomas POIESZ, Frank Pieter Albert Van Den Berkmortel |
2020-09-08 |
| 10712656 |
Method for manufacturing a membrane assembly |
Zomer Silvester HOUWELING, Eric Willem Felix Casimiri, Tamara Druzhinina, Paul Janssen, Michael Alfred Josephus KUIJKEN +8 more |
2020-07-14 |
| 10705439 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2020-07-07 |
| 10684554 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +1 more |
2020-06-16 |
| 10656536 |
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method |
Niek Elout De Kruijf, Mircea Dusa, Martijn Houben, Johannes Gerardus Maria Mulder, Thomas POIESZ +5 more |
2020-05-19 |
| 10649349 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface |
Sjoerd Nicolaas Lambertus Donders, Harry Sewell, Louis John Markoya, Marcus Martinus Petrus Adrianus Vermeulen, Diane Elaine Markoya |
2020-05-12 |
| 10649341 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more |
2020-05-12 |
| 10558129 |
Mask assembly |
Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns +17 more |
2020-02-11 |
| 10539886 |
Pellicle attachment apparatus |
Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn +19 more |
2020-01-21 |