Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10649341 | Lithographic apparatus | Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more | 2020-05-12 |
| 10620544 | Fluid handling structure, lithographic apparatus and device manufacturing method | Rogier Hendrikus Magdalena Cortie, Michel Riepen, Fabrizio Evangelista | 2020-04-14 |