Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10620544 | Fluid handling structure, lithographic apparatus and device manufacturing method | Paulus Martinus Maria Liebregts, Michel Riepen, Fabrizio Evangelista | 2020-04-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10620544 | Fluid handling structure, lithographic apparatus and device manufacturing method | Paulus Martinus Maria Liebregts, Michel Riepen, Fabrizio Evangelista | 2020-04-14 |