Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838310 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2020-11-17 |
| 10684554 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more | 2020-06-16 |
| 10620544 | Fluid handling structure, lithographic apparatus and device manufacturing method | Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Fabrizio Evangelista | 2020-04-14 |