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Lithographic apparatus and device manufacturing method |
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Lithographic apparatus and device manufacturing method |
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Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra |
2020-09-01 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens |
2020-08-11 |
| 10705432 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2020-07-07 |
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Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Erik Henricus Egidius Catharina Eummelen +7 more |
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Computational wafer inspection |
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2020-03-03 |
| 10527955 |
Lithographic apparatus and device manufacturing method |
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