Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768535 | Support apparatus, a lithographic apparatus and a device manufacturing method | Andre Bernardus Jeunink, Robbert Arij Jeroen De Jong, Martinus Hendrikus Antonius Leenders, Evelyn Wallis Pacitti, Thomas POIESZ | 2020-09-08 |