Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10656536 | Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Mircea Dusa, Martijn Houben, Johannes Gerardus Maria Mulder, Thomas POIESZ +5 more | 2020-05-19 |