Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866501 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Edwin Cornelis Kadijk, Sergei Shulepov | 2020-12-15 |
| 10802410 | Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid | Marcel Beckers, Stefan Philip Christiaan Belfroid, Ferdy Migchelbrink, Sergei Shulepov | 2020-10-13 |
| 10768536 | Lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens | 2020-09-08 |
| 10705439 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more | 2020-07-07 |
| 10599054 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more | 2020-03-24 |