Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802410 | Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid | Nicolaas Rudolf Kemper, Marcel Beckers, Ferdy Migchelbrink, Sergei Shulepov | 2020-10-13 |
| 10705439 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more | 2020-07-07 |
| 10599054 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more | 2020-03-24 |