Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802410 | Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid | Nicolaas Rudolf Kemper, Marcel Beckers, Stefan Philip Christiaan Belfroid, Sergei Shulepov | 2020-10-13 |
| 10725390 | Inspection substrate and an inspection method | Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio +8 more | 2020-07-28 |