Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802410 | Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid | Nicolaas Rudolf Kemper, Stefan Philip Christiaan Belfroid, Ferdy Migchelbrink, Sergei Shulepov | 2020-10-13 |
| 10649341 | Lithographic apparatus | Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more | 2020-05-12 |