Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788763 | Lithographic apparatus | Jan Steven Christiaan Westerlaken, Peter A. Delmastro, Thibault Simon Mathieu Laurent, Martinus Hendrikus Antonius Leenders, Mark Josef Schuster +4 more | 2020-09-29 |
| 10642166 | Patterning device cooling apparatus | Güneş Nakibo{hacek over (g)}lu, Lowell Lane Baker, Hakki Ergün Cekli, Geoffrey Alan Schultz, Laurentius Johannes Adrianus Van Bokhoven +3 more | 2020-05-05 |
| 10591828 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens +5 more | 2020-03-17 |
| 10534271 | Lithography apparatus and a method of manufacturing a device | Pieter Jeroen Johan Emanuel Hoefnagels, Ronald Frank KOX, John Maria Bombeeck, Johannes Cornelis Paulus Melman, Patricius Jacobus Neefs | 2020-01-14 |