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Substrate holder and method of manufacturing a substrate holder |
Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2020-12-29 |
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Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Sergei Shulepov |
2020-12-22 |
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Support apparatus, lithographic apparatus and device manufacturing method |
Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more |
2020-08-18 |
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Lithographic apparatus |
Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH +17 more |
2020-08-18 |
| 10654217 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Raymond Jacobus Wilhelmus Knaapen, Johan Frederik Dijksman, Sander Frederik Wuister, Ivar Schram |
2020-05-19 |
| 10649346 |
Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus |
Takeshi Kaneko, Joost Jeroen Ottens |
2020-05-12 |
| 10591828 |
Lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Koen Steffens, Takeshi Kaneko +5 more |
2020-03-17 |